COURSE TITLE: Vacuum Technology and common applications in Semiconductor Industry.
Semiconductor processes often require low pressure environments around the wafer surface. Therefore, it is essential to evacuate all atmospheric gas components through variety types of pump and configurations. Equipment that utilizes high vacuum applications normally consists of system components such as vacuum pumps, pressure gauges, mass flow controller and a reaction chamber. The understanding of vacuum principles are essential to a wide range of vacuum users, system designers, process and maintenance engineering personnel to ensure safety and proper handling of vacuum parts and components in their working environment
Upon completion, participants should be able to demonstrate/understand each of the following:
• Vacuum Basic Principles
• Vacuum System Components
• Vacuum Pumps and its Applications
• Gauges and Vacuum Seals.
• Mass Flow Controller (MFC)
• Principles of Leak Detection
• This Course will utilize a combination of lecture and discussions
• Practical / demonstration.
WHO SHOULD ATTEND
• Vacuum system users
• Equipment Engineer / Designer
• Maintenance Technician
• Process Engineer
In-house and customize trainings are available. Contact us for more detail
Tel: +60389955000 ext. 55279 | email: email@example.com
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