Nano Fabrication Services

These services are carried out in our Fab 1 which doubles up as research lab catering internal and external requests. The specific processes can also be integrated to our bigger commercial Fab 2 for IC-like products subject to specific cleanroom protocols and requirement. Special processes such as for MEMS/NEMS and Nano sensors are developed and carried out here. Complete or modular, pre and post-processes can be developed here which include

  • CVD functionalization of nanomaterials
  • Graphene CVD
  • Precious metal sputtering and evaporation
  • Photolithography
  • Deep etching etc.

Various other substrate materials compatible with the instruments such as sGaAs, glass, ceramics, polymer etc may also be used for developing own products. The activities are supported by adjacent commercial fab, IC design, failure, material analysis, test, reliability and 3D modelling labs.

Oxford Instruments PECVD
Tegal DRIE
Dual sided mask aligner
E-beam Evaporator
RF Sputterer
Coater & Developer
Wafer Bonder