Low Power Volatile Organic Compound Nanosensors
Nanosensors are being developed on 8-inch silicon wafers to identify VOCs absorbed onto the functional sensing materials (e.g. graphene derivatives and related 2D materials) by applying an electric field across the electrode structure. The sensing mechanism of VOC nanosensors is related to chemoresistive behavior of respective sensing materials. By monitoring time-dependence of resistance changes for each nanosensor, the absorption and desorption rates of VOCs onto the functional sensing materials are determined. Sensor arrays’ sensitivity and selectivity are used to fingerprint the VOCs under room temperature.
An ultra planarized electrode platform for the VOCs nanosensors offers efficient deposition of 2D functional sensing materials on 8 inches wafer. Incorporation of graphene and related 2D materials with band-gap engineering and surface functionalization is responsible for sensors’ high sensitivity and selectivity, ultra-fast response time and low limit of detection.
Electronic-nose sensor array applications for
- High speed
- Low power operations
- Modular design (single or array)
- Multi-transducer design
- Simple readout circuitry